Physics and Chemistry of PECVD

A plasma can be defined as a partially ionized, quasineutral gas, consisting of about equal numbers of positive and negative charges, and a different number of un-ionized neutral molecules. An external source of energy is needed to sustain the plasma for a sufficiently long time. The simplest and most widespread method 

This section treats the plasma physics and plasma chemistry of the typical silane-hydrogen RF discharge, with occasional examples that employ a somewhat higher excitation frequency. Electrical characterization of the discharge is followed by an analysis of the silane chemistry. An appropriate set of gas phase species is presented, which are then used in the modeling of the plasma. A comparison is made between modeling results and experimental work in ASTER. Extension to 2D modeling is presented as well. 

Plasma analysis is essential in order to compare plasma parameters with simulated or calculated parameters. From the optical emission of the plasma one may infer pathways of chemical reactions in the plasma. Electrical measurements with electrostatic probes are able to verify the electrical properties of the plasma. Further, mass spectrometry on neutrals, radicals, and ions, either present in or coming out of the plasma, will elucidate even more of the chemistry involved, and will shed at least some light on the relation between plasma and material properties. Together with ellipsometry experiments, all these plasma analysis techniques provide a basis for the model of deposition. 

Accelerated electrons in the applied electric field ionize gas molecules, and in these ionization processes extra electrons are created. In the steady state the loss of charged particles is balanced by their production. Due to their much lower mass, electrons move much faster than ions. As a result, charge separation creates 

The electrons follow the oscillations in the electric field, and experience the time-dependent plasma potential. Due to the capacitor through which the RF power is coupled to the electrodes, no dc current flows through the plasma. The ion and electron currents towards each of the electrodes balance each other over one RF period. 

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