Photoresist semiconductor manufacturing

To put the topic in perspective, the market size of the materials related to semiconductor manufacturing is now over 10 billions USD [3]. Among these key materials, the sum of CMP slurry and pad is over 11%, which is approaching the combination of photoresist and stripping chemicals (Fig. 2.3). On the one hand, this is a strong indication that CMP technology has become a... 

Most companies producing ICs today have been quite lax in the quality control of the liquid chemicals used in their processes. These chemicals include acids, bases, buffered etches, photoresists, and organic solvents. Essentially, the producers of ICs have left the quality control of these materials to the chemical manufacturers. Specifications for chemicals are set by SEMI (Semiconductor Equipment Manufacturers International) and are generally met by all chemical manufacturers. The level of metallic contaminations that can exist in U.S. chemicals ranges from 0.1 to 1 ppm. If the levels of metallic impurities were actually this high, U.S. manufacturers would not be able to produce integrated circuits. 

NQC A chemical used as the raw material of a photosensitive substance, which is one of several components of a photoresist used in the manufacturing process of semiconductors or liquid crystal displays. 

CD Photoresists using step-wise photoreaction. Manufacturing process of silicon semiconductor integraed circuit by using negative-tone photoresist... 

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