Semiconductor Equipment Manufacturers International

Most companies producing ICs today have been quite lax in the quality control of the liquid chemicals used in their processes. These chemicals include acids, bases, buffered etches, photoresists, and organic solvents. Essentially, the producers of ICs have left the quality control of these materials to the chemical manufacturers. Specifications for chemicals are set by SEMI (Semiconductor Equipment Manufacturers International) and are generally met by all chemical manufacturers. The level of metallic contaminations that can exist in U.S. chemicals ranges from 0.1 to 1 ppm. If the levels of metallic impurities were actually this high, U.S. manufacturers would not be able to produce integrated circuits. 

Semiconductor Manufacturing Companies FMEAs International SEMAT-ECH is a consortium of semiconductor equipment manufacturing companies from seven countries. Its Failure Mode and Effects Analysis (FMEA) A Guide for Continuous Improvement for the Semiconductor Equipment Industry recommends another FMEA technique. This guidance is given in the Guide ... 

Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, SEMI S2-0200. Mountain View, CA Semiconductor Equipment and Materials International, 2001. 

Other important guidelines for evaluating the acceptability of semiconductor processing equipment are issued by Semiconductor Equipment and Materials International (SEMI). SEMI S2-93-A, Product Safety Guidelines, is intended as a minimum set-of-performance based environmental health and safety requirements for equipment utilized in semiconductor manufacturing. ] These guidelines define minimum safety considerations manufacturers should adhere to when they sell process equipment. Some of the items included in S2-93-A are ... 

Laminar flowmeters are used in the testing of internal combustion equipment, in semiconductor manufacturing, leak testing, fan or blower calibration, and lately in alternative energy processes. The recommended installation practice is to provide 10 to 15 diameters of straight pipe upstream of the flow element. It is also highly recommended that the system be calibrated using the same gas as the process gas to be measured. 

Hazards Analysis Guide A Reference Manual for Analyzing Safety Hazards on Semiconductor Manufacturing Equipment, International SEMATECH Technology Transfer 99113846A-ENG. 

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