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Photoresist Reflow

In recent decades, a number of technologies have been developed to fabricate 3D molds. These include photoresist reflow, inkjet printing, unconventional lithography, and hybrids of those methods with conventional lithography. [Pg.1076]

Photoresist Reflow Photoresist reflow is a method to generate 3D hemispheric structures for... [Pg.1076]

Fabrication of 3D Mkrofluidic Structures, Fig. 13 Schematic of fabrication process of 3D polymer microstructures by combination of conventional photolithography and photoresist reflow (a) photoresist pat-teaned on the silicon wafer (b) photoresist mold after thermal treatment (c) PDMS casting on the photoresist mold (d) PDMS with desired structures... [Pg.1080]

Fabrication of 3D Microfluidic Stnictures, Rgure 7 SEM images of 3D structure of a mold fabricated by photoresist reflow (a) well or cell array (b) the enlarged edge of a single well mold... [Pg.651]

The comhination of conventional photolithography and photoresist reflow is an effective method to smoothly integrate microfluidic chamhers with microchannels. To fabricate a PDMS 3D microstructure joined with the microchannel by mold transfer, a master mold is needed. The photoresist reflow method was adopted to make the master mold for the 3D chambers and a negative photoresist SU-8 was used to generate the microstructure master mold for the microchannels. Since SU-8 is an epoxy-based photoresist and has good chemical stability with stands... [Pg.654]

Fabrication of 3D Microfluidic Stnictures, Rgure 14 SEM images of 3D microstructures fabricated by combination of conventional photolilhog-raphy and photoresist reflow (a) the photoresist mold (b) die PDMS 3D microstructure of the hemispherical chamber joined smoothly with the... [Pg.655]

See other pages where Photoresist Reflow is mentioned: [Pg.1076]    [Pg.1079]    [Pg.1081]    [Pg.1081]    [Pg.1299]    [Pg.1403]    [Pg.1403]    [Pg.1531]    [Pg.2713]    [Pg.2722]    [Pg.2722]    [Pg.2722]    [Pg.2722]    [Pg.2722]    [Pg.2725]    [Pg.3149]    [Pg.3327]    [Pg.3332]    [Pg.3491]    [Pg.651]    [Pg.655]    [Pg.789]    [Pg.827]    [Pg.827]    [Pg.926]    [Pg.1636]    [Pg.1642]    [Pg.1642]    [Pg.1643]    [Pg.1643]    [Pg.1646]    [Pg.1912]    [Pg.2078]    [Pg.2082]    [Pg.2186]   
See also in sourсe #XX -- [ Pg.1642 ]



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