Phosphorus-doped glass

Prakash, S. Mustain, W.E. Park, S. Kohl, P.A. (2008). Phosphorus-Doped Glass Proton Exchange Membranes for Low Temperature Direct Methanol Fuel Cells. J. Power Sources, Vol. 175, pp. 91-97... 

Since Si02 substrates appear frequently during IC fabrication, the adhesion test results for this substrate are important. Four types of oxides have been extensively tested. They are (1) thermal oxide grown at 7>1000°C, (2) softer oxide processed by conventional spin-on-glass technology, (3) phosphorus-doped LPCVD oxide, and (4) low-temperature (200°C) plasma deposited oxide. 

Figure 12 shows the fabrication flow for the two-mask-step a-Si TFT. DC sputtered Cr is deposited onto a substrate glass and patterned to form gate electrodes (a). SiNx, intrinsic amorphour Si (i a-Si) and phosphorus doped n a-Si are deposited succes-... 

The mechanical properties of the film are modified by doping. For instance, phosphorus atoms are introduced via conventional PSG (Phospo-silicate glass) sources or ion implantation. In-depth studies [4] revealed that incorporation of... 

The necessary incorporation of dopants (e.g., phosphorus and boron doped in silicate glasses) usually lowers deposition rates, due to competitive surface binding. 

All modern versions of the TID, also known as the nitrogen-phosphorus or NPD detector, employ a ceramic or glass bead or cylinder doped with an alkali metal salt, molded onto an electrical heater wire, heated to 400-800°C, as the thermionic source. Carrier gas is combined with hydrogen at the detector base and flows through a jet where it is mixed... 

Aral K, Namikawa H, Kumata K, Honda T, Ishii Y, Handa T (1986) Aluminum or phosphorus co-doping effects on the fluorescence and structural properties of neodymium-doped silica glass. J Appl Phys 59(10) 3430-3436... 

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