Phospho-silicate glass

A typical production reactor for the atmospheric deposition of Si02 and boro-phospho-silicate glass is shown in Fig. 5.11. 

The fabrication procedure of a magnetic flap actuator is shown in Fig. 7. The details on the fabrication procedure can be found in Liu et al. [4]. In the first step, phospho-silicate glass sacrificial thin film is deposited on top of the silicon substrate. This thin film is patterned to form mesas on which the actuator will be deposited. The mesas help in... 

The linear correlation obtained between the experimental Tg and the Fnet descriptor is reported in Fig. 5.3 the positive correlation (slope = 0.2851) accounts for the nature of the Tg measurement that represents the temperature necessary to overcome the flow activation energy. The robustness of the QSPR model is corroborated by the variety of glass compositions covered, which envisages ions with different structural role in the different environment of soda-lime-silicate and phospho-silicate glasses. 

The same descriptor Fnet is able to explains the 68 % of the variation in the crystallization temperature (Tc, first peak) of a series of phospho-silicate glasses doped with ZnO, giving a performance comparable with the descriptor Nx-o-x/Otot, which represents the total number of bridges detected in the three-dimensional stmcture derived by MD simulations, and thus accounts for the polymerization of the glass network [33]. 

Insulator - Nonconductive dielectric films used to isolate electrically active areas of the device or chip from one another. Some commonly used insulators are silicon dioxide, silicon nitride, boro-phospho-silicate glass (BPSG), and phospho-sili-cate glass (PSG). 

Figure 1.8 Polysilicon surface micromachining, (a) An insulating surface layer such as silicon nitride is deposited on the substrate, (b) A sacrificial spacer layer, such as phospho-silicate glass (PSG), which can be etched quickly, is deposited, (c) A hole is cut through the sacrificial layer to the insulating layer, where the structure is to be anchored to the underlying surface material, (d) The structural layer, in this example polysilicon, is then deposited. The deposition is conformal and fills in the hole that had previously been cut through the sacrificial layer, (e) The structural layer is patterned and then (f) released. (Reprinted with permission from ITC International Test Conference, MEMS Fabrication, Gary K. Fedder, 1967 IEEE.)...

L. Linati, G. LusvarcU, G. Malavasi, L. Menabue, M.C. Menziani, P. MustareUi, A. Pedone, U. Segre, Medium range order in phospho-silicate bioactive glasses insights from MAS-NMR spectra, chemical durability experiments and molecular dynamics simulations. J. Non-Cryst. Solids 354, 84-89 (2008)... 

A. Pedone, G. Malavasi, M.C. Menziani, Computational insight into the effect of CaO/MgO substitution on the structural properties of phospho-silicate bioactive glasses. J. Phys. Chem. C 113(35), 15723-15730 (2009)... 

R. Dupree, D. Holland, M. G. Mortuza, J. A. Collins and M. W. G. Lochyer, Magic Angle Spuming NMR of Alkali Phospho-Alumino-Silicate Glasses, J. Non-Cryst. Solids, 112, 111-119 (1989). 

---