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Pad Grooves

Doy T, Seshimo K, Suzuki K, Philipossian A, Kinoshita M. Impact of novel pad groove designs on removal rate and uniformity of dielectric and copper CMP. J Electrochem Soc 2004 151(3) G196-G199. [Pg.120]

Muldowney G. Modeling CMP transport and kinetics at the pad groove scale. Proceedings of the Material Research Society 2004. p K5.3.1-K5.3.6. [Pg.120]

FIGURE 5.2 Cross section of type III and type IV polyurethane pads (a) type III pad (ICIOOO, grooved), (b) type IV pad (Mipox NCP pad, grooved). [Pg.126]

Pad Groove Effects Most polishing pads have grooves on their surface. Grooves on polishing pad surfaces have many important functions [1,2] ... [Pg.138]

Change in slurry particle Change in rate (carrier related) pad texture (grooves, perforations, texture) Slurry flow slurry nonuniformity ... [Pg.168]

Pad texture (e.g., grooving) Thickness of lubrication film Rate nonuniformity... [Pg.170]

The disadvantages of pad A, as compared to pad B, are twofold (1) the grooving imposing a pad-life limit, because once the grooves are worn out, the pad can no longer polish and (2) the difficulty in putting the whole pad successfully on a platen without entrapping bubbles to accomplish this, more skilled technicians are required. Perforated pads do not have these problems. [Pg.249]

Another issue with the end effector is its down force during conditioning. This down force must be as low as possible, as long as the polish rate remains stable. If the down force is set too high, the resultant high wear rate shortens the pad life. Once the grooves on the pad are worn out, the pad can no longer deliver slurry. [Pg.257]

An imager is disclosed in JP-A-3104278 in which detector elements are separated by grooves and a connection pad of a common electrode is provided in line with the connection pads of the detector elements. [Pg.88]

Borucki L, Charms L, Philipossian A. Analysis of frictional heating of grooved and flat CMP polishing pads. Electrochem Soc 2004 151(12) G809-813. [Pg.54]

FIGURE 4.6 Values of /I (tribological mechanism indicator) describing boundary lubrication for an IC1400 K-groove pad at 25% solids and partial lubrication for an ICIOOO flat pad at 12.5% solids (from Ref 6). [Pg.89]

See other pages where Pad Grooves is mentioned: [Pg.98]    [Pg.33]    [Pg.42]    [Pg.42]    [Pg.127]    [Pg.129]    [Pg.139]    [Pg.520]    [Pg.121]    [Pg.399]    [Pg.401]    [Pg.461]    [Pg.461]    [Pg.98]    [Pg.33]    [Pg.42]    [Pg.42]    [Pg.127]    [Pg.129]    [Pg.139]    [Pg.520]    [Pg.121]    [Pg.399]    [Pg.401]    [Pg.461]    [Pg.461]    [Pg.580]    [Pg.209]    [Pg.1009]    [Pg.249]    [Pg.580]    [Pg.53]    [Pg.14]    [Pg.25]    [Pg.27]    [Pg.97]    [Pg.248]    [Pg.580]    [Pg.412]    [Pg.114]    [Pg.33]    [Pg.38]    [Pg.83]    [Pg.88]   
See also in sourсe #XX -- [ Pg.42 , Pg.88 , Pg.89 , Pg.129 , Pg.130 , Pg.138 , Pg.139 , Pg.520 ]



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Grooves

Grooving

PAD

Padding

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