Oxygen plasma developable surface

To increase the stability of a surface-treated substrate, a variety of approaches have been developed. For example, different plasma gases can be applied to reduce the amount of surface reorganization. Specifically, nitrogen-treated surfaces maintain their hydrophilicity longer than oxygen plasma-treated surfaces. Also, to maintain stable hydrophilic PDMS, it is possible to fabricate C-F bonds or react poly(HEMA) bonds on PDMS microchannel surfaces [5]. 

Figure 1. STM images of the HOPG surface following oxygen plasma exposure to develop porosity. Treatment conditions (a) MW power of 40 W, 6 s. (b-d) MW power of 100 W, 9 min.

FIGURE 15. Bilayer polysilane photoresist after exposure, development and oxygen plasma etching. Conversion of the polysilane surface to Si02 is evident. By courtesy of IBM Almaden Research Laboratories. Reprinted with permission from Materials for Microlithography, Am. Chem. Soc., Symposium Series. Copyright (1984) American Chemical Society... 

In addition to the recast samples, as-received, melt extruded films of the nylon 6 and nylon 6/layered silicate nanocomposite (7.5wt%) were exposed to the oxygen plasma. The nylon 6 nanocomposite develops of a colorful, interferometric surface reflection upon exposure (not shown). The optical interference effects suggest highly uniform alteration of the surface composition on the order of 200-500 nm. 

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