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Nonvolatile Memories Based on Nanocrystals

It is known that if material A is grown on top of material B and is thermodynamically unstable or metastable, layer A is rough and subsequent agglomeration or nanocrystallization occurs. This frequently happens when postgrowth thermal annealing is performed. [Pg.532]

Nanocrystallization via dewetting of materials has been observed in processing techniques, including ion implantation followed by thermal annealing, laser ablation, high-vacuum deposition, and molecular beam epitaxy In this section we focus on [Pg.533]


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