Nonthermal processes used in EUV optics contamination mitigation

4 Nonthermal processes used in EUV optics contamination mitigation 

Contamination mitigation strategies based on radiation-induced or nonthermal processes involving electron- and photon-induced chemistry on surfaces have 

Stampfl and M. Scheffler, Anomalous behavior of Ru for catalytic oxidation A theoretical study of the satal3dic reaction CO-f I/2O2 — CO2, Phys. Rev Lett. 78, 1500 1503 (1997) H. Over, Y.D. Kim, A.P. Seitsonen, S. Wendt, E. Lundgren, M. Schmid, P. Varga, A. Morgante, and G. Ertl, Atomic scale structure and catalytic reactivity of the RuO2(110) surface, Science 287, 1474 1476 (2000). 

It has been reported that carbon deposits on EUV optics can be removed 

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