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Contamination mitigation strategies

Contamination mitigation is required to maintain EUV exposure tool and mask productivity. A number of mitigation strategies have been reported for tackling [Pg.730]


Contamination mitigation strategies based on radiation-induced or nonthermal processes involving electron- and photon-induced chemistry on surfaces have... [Pg.733]

This section focuses on the contamination mitigation strategies on the fuel stream and the oxidant gas (air). Mitigation strategies on other impurities (including silica, organic compounds, cations, and solid particles) will not be discussed. [Pg.381]

The most straightforward method of eliminating harmful effects of contamination on both the air and fuel sides of PEMFCs is to remove the impurities from the gas streams and component materials before they enter the cell. This could be accomplished through the development of appropriate filtration devices in the air stream and the pretreatment of the reformate in the fuel stream. However, with this type of contamination mitigation strategy it is difficult to remove the contaminants to values less than 10 to 50 ppm, which are still harmful levels. Therefore, it is necessary to develop contamination mitigation strategies within the fuel cell. [Pg.391]

To maintain acceptable indoor air quality, the concentration of pollutants known to degrade indoor air quality and affect human health must be controlled. If the origin of the contaminant is known, it is more effective to exercise source control over any mitigation strategy. If the origin of the contaminants is not known, building ventilation and air cleaning and filtration are the two most commonly used processes to dilute or remove all types of contaminants from the indoor air and maintain acceptable indoor environmental conditions. [Pg.54]

Alaerts, GJ. and Khouri, N. (2004) Arsenic contamination and groundwater mitigation strategies and policies. Hydrogeology Journal, 12(1), 103-14. [Pg.199]

Proton Exchange Membrane Fuel Cells Contamination and Mitigation Strategies... [Pg.374]

Scholz S, Schirmer K, Altenburger R. Pharmaceutical contaminants in urban water cycles - A discussion of novel concepts for environmental risk assessment. In Kassinos F, Bester K, K ummerer K, eds. Xenobiotics in the Urban Water Cycle Mass Flows, Environmental Processes and Mitigation Strategies. Vol 16. Heidelberg Springer 2010. [Pg.267]


See other pages where Contamination mitigation strategies is mentioned: [Pg.730]    [Pg.919]    [Pg.48]    [Pg.374]    [Pg.391]    [Pg.419]    [Pg.431]    [Pg.730]    [Pg.919]    [Pg.48]    [Pg.374]    [Pg.391]    [Pg.419]    [Pg.431]    [Pg.392]    [Pg.199]    [Pg.234]    [Pg.234]    [Pg.234]    [Pg.235]    [Pg.175]    [Pg.148]    [Pg.151]    [Pg.39]    [Pg.261]    [Pg.101]    [Pg.731]    [Pg.731]    [Pg.280]    [Pg.342]    [Pg.331]    [Pg.337]    [Pg.339]    [Pg.1057]    [Pg.41]    [Pg.47]    [Pg.85]    [Pg.86]    [Pg.100]    [Pg.117]    [Pg.419]    [Pg.421]    [Pg.422]   
See also in sourсe #XX -- [ Pg.730 , Pg.731 , Pg.732 , Pg.733 , Pg.734 , Pg.735 , Pg.736 ]




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Mitigation

Mitigation strategies

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