NITRIDES vapor phase synthesis

Vapor-Phase Techniques. Vapor-phase powder synthesis teclmiques, including vapor condensation, vapor decomposition, and vapor—vapor, vapor—Hquid, and vapor—soHd reactions, employ reactive vapors or gases to produce high purity, ultrafine, reactive ceramic powders. Many nonoxide powders, eg, nitrides and carbides, for advanced ceramics are prepared by vapor-phase synthesis. 

Vapor—vapor reactions (14,16,17) are responsible for the majority of ceramic powders produced by vapor-phase synthesis. This process iavolves heating two or more vapor species which react to form the desired product powder. Reactant gases can be heated ia a resistance furnace, ia a glow discharge plasma at reduced pressure, or by a laser beam. Titania [13463-67-7] Ti02, siUca, siUcon carbide, and siUcon nitride, Si N, are among some of the technologically important ceramic powders produced by vapor—vapor reactions. 

Bauer,R., Smulders,R, Geus,E., vanderPut, J., and Schoomman, J., Laser Vapor Phase Synthesis of Submicron Silicon and Silicon Nitride Powders from Halogenated Silanes, Ceram. Eng. Sci. Proc., 9(7-8) 949-956(1988)... 

A.1 Fundamentals of Vapor Phase Synthesis. In this section we will concentrate on the vapor phase synthesis of some structural ceramics, such as carbides and nitrides. The principles described here apply equally well to the production of oxide ceramics, but we reserve some of this description for later sections, particularly with respect to the formation of optical fibers. 

Carbothermal nitridation of silica, including rice huUs Diimide synthesis Vapor-phase synthesis Plasmachemical synthesis Laser-induced reactions Pyrolysis of organosilicon compounds... 

In general, carbides, nitrides, and borides are manufactured in the vapor phase in order to form high-purity powders. This procedure is fundamentally different than a strict CVD process, since in powder synthesis reactors, deposition on seed particles may be desirable, but deposition on the reactor walls represents a loss of product material. As we will see, in CVD, heterogeneous deposition on a surface will be sought. Aside from this issue of deposition, many of the thermodynamic and kinetic considerations regarding gas phase reactions are similar. 

According to the thermodynamic calculation, it is possible to make a conclusion that all presented SHS-Az systems can be self-igniting. Moreover, combusting temperatures and reaction heat are sufficient for base products formation. The presence of the active nitrogen and fuel elements without oxide layer is a supposition for the positive result of nitride synthesis by azide technology. At that, formation reactions of some nitrides are carried out in the gas-vapor phase, that allows to get nano-sized nitride powders. 

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