Nanoelectromechanical systems NEMS

Recently, a great interest appeared in nanoelectromechanical systems (NEMS), which convert electrical current into mechanical motion on a nanoscale and vice versa. The ultimate goal of the NEMS research is development of commercial applications like sensors and actuators at a nanoscale. Currently, the fundamental side of NEMS is being extensively explored, with new physical phenomena being revealed. 

Mechanically interlocked molecules, such as bistable catenanes [13] and [2]rotax-anes [14], constitute some of the most appropriate candidates to serve as nanoscale switches and machines in the rapidly developing fields of nanoelectronics [15] and nanoelectromechanical systems (NEMS) [16]. The advantages of using mechanically interlocked molecules in the fields of molecular electronics and... 

IMPORTANT MATERIALS APPLICATIONS V NANOELECTROMECHANICAL SYSTEMS (NEMS)... 

Continued advances in silicon nanoelectronics and beyond will enable developments in adaptive and reconfigurable devices. To enable energy-efficient operation, low-power and low-noise electronics are needed for novel network architectures and advanced systems that incorporate novel nanoelectromechanical systems (NEMS), nanosensors, and nanoactuators. 

D machining of electrochemically active materials, including the construction of unconventional island patterns on a surface with nanoscale resolution, was also realized by this method [95, 115-117]. Thus, electrochemical machining can be applied to microelectromechanical systems (MEMS] [118] and even in the nanoelectromechanical systems (NEMS]. Electrochemical methods can realize the nanofabrication in a selective place and make the complicated 3D nanostructures. Conducting polymers can also be fabricated in this way. Similar to the electrochemical machining, by application of short voltage pulses to the tool electrode in the vicinity of the workpiece electrode, the electropolymerization... 

Apart from MEMS resonators, there has been significant development in the area of NCD-based nanoelectromechanical systems (NEMS) resonant structures. L. Sekaric et al. [40] developed a ring oscillator fabricated out of a 30-nm NCD film with a gold electrode on top. Figure 12.9 shows the SEM image of the nano resonator. 

When designing devices, such as nanoelectromechanical systems (NEMS), an understanding of the nanoscale mechanical properties of materials is essential, since they may incur thermal or mechanical stress dming operation. Tensile tests may be performed within such systems by means of thin-hlm samples and the amplitude of the applied stress may be controlled by the frequency and amphtude of the input electrostatic energy. During such experiments, mechanical-ampUher actuators exhibit time-delayed failure and their resonant frequencies decrease monotonically over the test time, when the maximum operating stress exceeds... 

Examples of nanomaterials can be classified in different ways. Some of the common classes are based on application and consist of the following carbon nanotubes (fuUerenes), nanoparticles, nanorods, and nanoelectronic devices. Other more specific are, for example, medical applications, silicon solar cells, semiconductors, nanoelectromechanical systems (NEMS) or microelectromechanical systems (MEMS), and nanolithography. Another major potential application is in the medical field as nanorobotics. 

In addition to household and conventional products, possible use of roughness-or heterogeneity-induced superhydrophobicity in nano- and biotechnology applications is often discussed. This includes, for example, nonsticky surfaces for the components of micro/nanoelectromechanical systems (NEMS/MEMS). Since adhesion plays an important role for small devices, the so-called stiction of two component surfaces is a significant problem in that industry, which may lead to device failure. Making a surface hydrophobic can reduce meniscus force and stiction. 

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