Nano-electro-mechanical systems

One of the technological ways to miniaturize fuel cells is to have recourse to standard microfabrication techniques mainly used in microelectronics and more especially the fabrication of micro- and nano-electro-mechanical systems (MEMS/NEMS). Actually more and more papers show the interest in developing MEMS-based fuel eells, either directly with silicon substrates (fig. 2), or adapting the methods to other substrates such as metals or polymers. These techniques enable notably mass fabrication at low cost (very large number of devices on a very small area) and then eould lead to the reduetion of the global cost of the miniature fuel cells. 

Nano-Electro-Mechanical-Systems) and LOG (Lab-on-Chip) technologies. 

Kaul, A.B., 2013. Nano-electro-mechanical-systems (NEMS) and energy-efficient electronics and the emergence of two-dimensional layered materials heyond Graphene. Micro Nano Tech. Sens Syst. App V 8725, 872502. 

The nano and microfabrication technologies for manufacturing Micro-Electro-Mechanical Systems (MEMS) are now widely used in biological studies which... 

The hierarchy of nanomaterials contains the considerable list of various groups, such as, (i) fuUerenes and their derivatives, (ii) single wall carbon nanotubes (SWCN) (iii) multi walls carbon nanotubes (MWCNT) (iv) graphene (v) micro-electro-mechanical systems (MEMS) (vi) metal nano oxides (vii) quantum dots, and others. One can expect that in the near future this list will be extended owing to intensive work of experimentahsts. 

We hope that this book will prove valuable to the numy scientists and engineers working in the fast-moving semiconductor industry. We also hope that it will be useful to faculty members, graduate students, imdergraduate students, or anyone who has interests in the exciting fields of microelecfronics, nanoelectronics, organic elecfronics, and optoelectronics. This book will also serve as a valuable reference for those who are interested in nanofabrication, micro- and nano-fluidics, micro-and nano-photonics, Micro-Electro-Mechanical Systems (MEMS), BioMEMS, porous media, hi -tenq>erature polymers, as well as nano-structured materials. 

Naka, K., Hayashi, H., Senda, M., Shiraishi, H., and Konishi, S. 2007. Effect of nano stripe carbonized-polymer electrode on high S/N ratio in electrochemical detection. Proceedings of the IEEE Twentieth Annual International Conference on Micro Electro Mechanical Systems, Hyogo, Japan 1/2 374—377. 

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