Microwave ion source

Nikolaev VS, Dmitriev IS (1968) Phys Lett A 28 277 Osipovicz T, Breeze MBH, Watt F, van Kan JA, Bettiol AA (eds) (2007) Nud Instrum Methods B 158 1-482 Prczesky VM, Przybylowicz WJ, Pineda CA (eds) (1999) Nucl Instrum Methods B 158 1-735 Rajta I, Kiss AZ, Kertesz Zs, Szikszai ZA, Simon A (eds) (2009) Nucl Instrum Methods B 267 1995-2340 Reijonen J (2000) Plasma and ion beam generation using RF and microwave ion sources. PhD dissertation, University Jyvaskyia, Finland RFQ (2003) http //hsbpcl.ikf.physik.uni-frankfurt.de/ ezr/rfq.htm... 

A novel microengineered instrument with a rather different planar electrode layout has been proposed by Muller [3]. Figure Id shows the device, which uses the microwave ion source described earlier and electrostatic filtering. This time, however, mass selection is based on the filtering action provided by the interaction between the ion beam and a three-phase travelling electrical field, which is created by a periodic electrode structure fed by suitably phased drive signals. 

Further designs of ion sources applied in plasma spectroscopy such as electrodeless microwave induced plasmas (MIPs) operating in a noble gas atmosphere at low power (mostly below 200 W) or capacitively coupled microwave plasma using Ar, He or N2 the as plasma gas (at 400-800 W) were described in detail by Broekaert.33 Microwave plasmas produced by a magnetron are operated at 1-5 GHz. Their special application fields for selected elements and/or element species are based (due to the low power applied) in atomic emission spectrometry.33... 

Recently, Hieftje et al.15-16 equipped a small double-focusing mass spectrograph built in house with Mattauch-Herzog geometry with several ion sources (such as glow discharge, an inductively coupled plasma ion source or a microwave plasma torch) and a novel array detector for simultaneous ion detection. 

Pack et al. described the coupling of GC separations to TOF-MS by utilization of a microwave plasma torch (MPT) [50]. This low-power microwave plasma source has exhibited excellent limits of detection for halogenated species. When such species are separated by GC, the simultaneous capabilities of TOF-MS allowed the monitoring of 12C and 35C1 simultaneously, thereby facilitating the determination of empirical formulas. Presumably, ion chromatographic separations, FIA systems, and other separations might also benefit from the capabilities of TOF-MS. 

RF- and ion-beam assisted PLD PLD chamber equipped with RF or microwave plasma source or ion beam source to enhance the composition of particular film components such as N or O to grow in-plane aligned films on polycrystalline substrates, and to grow nanostructures [128]... 

For GaN-based semiconductor lasers with a stripe geometry, it is necessary to fabricate a smooth and vertical facet for the resonator, which has been reported by Saotome et al [32,33] and Itaya et al [34], The RIBE system used in this study has an electron cyclotron resonance (ECR) ion source, and ECR plasma is generated by introducing a 2.45 GHz microwave into a horizontal discharge chamber on... 

Fig. 6. A flowing afterglow ion source used by Milligan et al. [42] in the study of the HJ+N reaction. Ions are generated by electron impact, or by the action of a microwave discharge...

Fig. 3. Schematic diagram of the guided ion beam tandem mass spectrometer, double octopole configuration. Pumping speeds are shown. Ion sources available are listed and the microwave discharge source is shown. Adapted from [9]...

Olson, L.K. Caruso, J.A. The helium microwave-induced plasma—An alternative ion-source for plasma-mass spectrometry. Spectrochim. Acta, Part B 1994, 49, 7-30. 

As in the sources used in optical atomic spectrometry a considerable ionization takes place, they are also of use as ion sources for mass spectrometry. Although an overall treatment of instrumentation for mass spectrometry is given in other textbooks [68], the most common types of mass spectrometers will be briefly outlined here. In particular, the new types of elemental mass spectrometry sources have to be considered, namely the glow discharges and the inductively and eventually the microwave plasmas. In contrast with classical high voltage spark mass spectrometry (for a review see Ref. [69]) or thermionic mass spectrometry (see e.g. Ref. [70]), the plasma sources mentioned are operated at a pressure which is considerably... 

A microwave plasma torch can be operated very stably with argon as well as with helium and can be used as an ion source for time-of-flight mass spectrometry. Such a system, as described by Pack et al. [76], is very useful for element-specific detec-... 

Satzger R. D., Fricke F. L., Brown P. G. and Caruso J. A. (1987) Detection of halogens as positive ions using a He microwave induced plasma as an ion source for mass spectrometry, Spectrochim Acta, Part B 42 705-712. 

Wilson D. A., Vickers G. H. and Hieftje G. M. (1987) Use of microwave-induced nitrogen discharge at atmospheric pressure as an ion source for elemental mass spectrometry, Anal Chem 59 1664— 1670. 

By working principle, they can be classified as hot filament sources, ion sources based on Penning discharge (PIG), radio frequency (RF) and microwave (MW) ion sources, electron cyclotron resonance (ECR) ion sources, electron beam ion sources (EBIS, EBIT), laser ion sources, cusp and multicusp ion sources, sputtering ion sources. 

The SIFT-MS instrument shown here may be viewed as consisting of four distinct regiorts. The ion source region is a microwave discharge of moist air. As noted in Sect. 8.1.2, the dominant terminal ions from a discharge in air are H3O+ NO% and O/. This mixture of ions is transmitted to the lower pressure upstream quadrupole... 

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