Micromirror Devices

Figure 2.4 Digital micromirror device (DMD). (From Singh-Gasson, S. et al., Nat. Biotechnol., 17,974-978,1999 and Lee, P. et al, /. Micromechanics Microeng., 13,474—481, 2003. With permission.)...

Oligonucleotide and peptide microarrays can be prepared in situ with light-directed synthesis on a glass surface in conjunction with either a photolithographic method or using a micromirror device (2,11-15). However, these methods are not useful for most organic synthesis. Furthermore, such approaches require equipment that is not readily available. Spot synthesis on cellulose membrane is another in situ synthesis method, but the resulting microarrays are low density (16). 

FIGURE 14.9 Illustration of two tilted micromirrors of TI s digital micromirror device. 

FIGURE 14.10 Schematic cut-through of the micromirror device. Three CMP steps have to be performed (1) oxide planarization of CMOS passivation, (2) Cu damascene of vias, and (3) CMP of thick Cu sacrificial layer until the Ni posts are exposed. 

Three CMP steps have been employed in the manufacturing sequence, (b) Closeup view of micromirror device. Gold mirror plates and nickel wedged deflection electrodes are clearly visible. 

Henck, S.A. Lubrication of Digital Micromirror Devices . Tribology Lett. 1997, 3 (3), 239-247. 

L.J. Hornbeck, Current status of the digital micromirror device (DMD) for projection television applications, IEEE International Electron Devices Meeting, Tech. Digest 1993, 381-384. 

Grogan SP, et al. Digital micromirror device projection printing system for meniscus tissue engineering. Acta Biomater 2013 9 7218-26. 

Grogan, S.P., Chung, P.H., Soman, P, Chen, P, Lotz, M.K., Chen, S., D lima, D.D., 2013. Digital micromirror device projection printing system for meniscus tissue engineering. Acta... 

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