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Microengineering applications

However, high aspect ratio three-dimensional (3D) microfeatures are required in various microengineering applications. These can be machined by 3D EMM. Very hard, noncorrosive, and electrically conductive materials are suitable for microtools, such as tungsten, tungsten carbide, and... [Pg.101]

MICRODEVICES FABRICATION FOR MICROELECTROMECHANICAL SYSTEMS AND OTHER MICROENGINEERING APPLICATIONS... [Pg.185]

EMM can also be effectively utihzed for fabrication of several of microfeatures for a wide range of microengineering applications such as fuel processing, aerospace, heat transfer, microfluidics, and biomedical applications. These microdevices have to often withstand high stresses at elevated temperatures during their service in different applications such as microcombustors, electrochemical reactions required at elevated temperatures in microreactors, and also in microthermal devices. For biomedical applications, microcomponents are to be made of biocompatible materials and... [Pg.198]

Microdevices fabrication for MEMS and other microengineering applications have been reported in Chapter 10. It presents a clear view on fabrication of microfeature of aluminum, copper, stainless steel, nickel, and titanium, etc., for MEMS. Some of the interesting topics included in this chapter are fabrication of high aspect ratio features for MEMS as well as micromachining of semiconductor by EMM. Here, EMM has successfully demonstrated its capabifity as an alternative technique for machining of microdevices with three-dimensional features of higher resolutions on metals as well as semiconductors. [Pg.278]

Combustion in small volumes has recently become of interest to applications of micropower generation [77-81], micropropulsion [82-94], microengines [95-102], microactuation [103-105], and microfuel reforming for fuel cells... [Pg.250]

A. Stoffel, A. Kovacs, W. Kronast, and B. Miiller. LPCVD against PECVD for micromechanical applications. . Journal of Micromechanics and Microengineering 6 (1996), 1-13. [Pg.115]

Becker, H., Lowack, K., and Manz, A. Planar quartz chips with submicron channels for two dimensional capillary electrooresis applications, Journal of Micromechanics and Microengineering 1998, 8, 24-28. [Pg.1149]

EMST has a very wider range of applications in electronics, microengineering, material science, and chemical and biological analysis. In many fields of applications, scientists are still developing EMST to make it more precise for effective implementation. Some of the applications are listed below ... [Pg.215]

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See also in sourсe #XX -- [ Pg.198 ]



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