Microelectromechanics Nanoelectromechanics

Electrochemically Fabricated Microelectromechanical Systems/ Nanoelectromechanical Systems (MEMS/NEMS)... 

D machining of electrochemically active materials, including the construction of unconventional island patterns on a surface with nanoscale resolution, was also realized by this method [95, 115-117]. Thus, electrochemical machining can be applied to microelectromechanical systems (MEMS] [118] and even in the nanoelectromechanical systems (NEMS]. Electrochemical methods can realize the nanofabrication in a selective place and make the complicated 3D nanostructures. Conducting polymers can also be fabricated in this way. Similar to the electrochemical machining, by application of short voltage pulses to the tool electrode in the vicinity of the workpiece electrode, the electropolymerization... 

MEMS Microelectromechanical systems NEMS Nanoelectromechanical systems PECVD Plasma-enhanced chemical vapor... 

First, the main difference between NC and UNCD films has to be considered. The decrease of the crystal grain size from NC to UNCD films increases the number of grain boundary interfaces. This also results in a decrease of thermal conductivity and an increase of the optical absorption of UNCD films compared to NC films. At the same time, the friction coefficient of UNCD films is lower than that of NC films. Both types of CVD films can be used for MEMS (microelectromechan-ical systems), NEMS (nanoelectromechanical systems), and also for electrochemical applications. " DND is applied as an abrasive for ultrafine mechanical polishing of hard surfaces of materials. Present-day polishing compositions based on detonation ND offer the possibility of obtaining... 

Examples of nanomaterials can be classified in different ways. Some of the common classes are based on application and consist of the following carbon nanotubes (fuUerenes), nanoparticles, nanorods, and nanoelectronic devices. Other more specific are, for example, medical applications, silicon solar cells, semiconductors, nanoelectromechanical systems (NEMS) or microelectromechanical systems (MEMS), and nanolithography. Another major potential application is in the medical field as nanorobotics. 

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