Metal-Insulator-Semiconductor FET MISFET

Figure 14-6. Schematic view of three kinds of field-effect transistors (FET) (a) metal-insulator-semiconductor FET (MISFET), (b) metal-semiconductor FET (MESFET), (c) thin-film transistor (TFT).

Miyahara et al. (1985) developed an integrated enzyme FET based on a silicon-on-sapphire (SOS) sensor for simultaneous determination of glucose and urea. Three ISFETs and two metal insulator semiconductor FETs (MISFETs) were integrated on a surface area of 2.5 mm x 2.5 mm (Fig. 54). One of the ISFETs served as reference sensor in order to compensate the signals caused by pH changes of the solution the two others were covered by GOD and urease, respectively. The MISFETs can be used as pH electrodes. For enzyme immobilization the chip was covered with a laminated photosensitive layer of 75 pm thickness and,... 

Field effect transistors In the fabrication of some potentiometric and gas-sensitive biochemical sensors an important role is played by unipolar transistors controlled by an electrical field (field effect transistors, FET) with a conducting channel isolated from the control electrode (gate) by a thin layer of insulator (MISFET-metal insulated semiconductor FET) made of Si02 (MOSFET-metal oxide semicon-... 

MISFETs), 22 162, 192. See also Field effect transistors (FETs) Metal-insulator-semiconductor junction, 23 34... 

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