MEMS Pro

Layout is the activity that is used to define the features on each mask level, and the relationship between features on different mask levels. There are a number of different computer-aided design (CAD) tools available for layout, with some being more user friendly than others. Some examples of layout editors include L-Edit, MEMS Pro, IntelliSense (IntelliMask), AutoCAD, Jale3D, and Coventor (Designer). Some layout editors come with process setup files for the available MPW processes, which can make layouts for these processes much simpler. Some layout tools also include the ability to do automated design rule... 

Figure 1.20 L-Edit screen with MEMS Pro upgrade. (Reprinted with permission from Dr. Mary Ann Maher, SoftMEMS.)...

Use L-Edit/MEMS Pro to lay out your name in the PolyMUMPS process. Use the PolyO layer to make the letters, which should... 

If you use oxide, be sure that it is not completely etched away during the sacrificial release step or your structure will be released Use the cross-section tool in MEMS Pro to find a cross section of the structure including the anchor to the substrate. Make a solid model... 

Lay out a comb-drive resonator in the Poly MUMPS process using L-Edit in MEMS Pro as shown in Figure 2.20. Use the Polyl layer (h = 2 pm) for fabrication of the comb-drives and folded springs. 

Produce a solid model of a fixed-free cantilever beam in the device layer of the SOIMUMPS process using L-Edit/MEMS Pro or a similar layout tool. An example of a cross section of a cantilever beam (not to scale) is shown in Figure 1.1 of the SOIMUMPS Design Handbook. If the thickness t of the beam is x pm, the width W should be lOx pm and the length L should be lOOx pm. What are... 

Pro Mem 9.2) A siign F or S confiieuratMti to thtr chirility cvnunv in tK fnUowing tnolMules ... 

Reineke R, Memming R (1989) In Hall DO, Grass G (eds) Photo conversion pro-cesses for energy and chemicals. Elsevier, Essex, UK, p 129... 

All are probably bound to the microsomal mem-branes. ° ° An NADPH-dependent reductase reduces vitamin K quinone to its hydroquinone form. Conversion of Glu residues to Gla residues requires this reduced vitamin K as well as O2 and CO2. During the carboxy-lation reaction the reduced vitamin K is converted into vitamin K 2,3-epoxide (Eq. 15-55). The mechanism is uncertain but a peroxide intermediate such as that shown in Eq. 15-56 is probably involved. This could be used to generate a hydroxide ion adjacent to the pro-S -H of the glutamate side chain of the substrate. This hydrogen could be abstracted by the OH to form... 

Fig. 8.3 Structure of azaproline (azPro) 1 and c/s-Ala-azPro 8-membered ring compared with the trans-Ala-Pro 7-mem-bered ring.

FIG. 3 Effects of memantine (MEM I8mg/kg. sc) and atropine. sulfate (ATS 16mg/kg, sc), given pro-phylaciically 60 and 15 min, respectively, before administration of DFP (l.Smg/kg, sc), on AChE activity in skeletal muscle.s (.soleus, EDL. and diaphragm) of rats. Rats were sacrificed 60 min after DFP injection. Values of AChE (cxpre.sscd as percentage of remaining activity) are presented as means SEM (n = 5). 

A capillary system with the appropriate design of bubble-actuated IxAf microfluidic switches is successfully demonstrated to control continuous liquid into the desired outlets without the need of external pumps and MEMS mechanical moving parts. Theoretical models are pro-... 

Table 6.6 Refined crystal parameters and reliability factors in Rietveld and MEM-based-pattern-fitting analyses for (Pro.9Lao.i)2(Nio.74Cuo.2iGao,o5)04+a 1288.8 K (5 = 0.0154(3)) [15]...

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