Materials for heater fabrication

To avoid catalytic interaction of the analyte with a heater made of noble metal, the films are frequently coated with a thin, chemically inert layer of SiO. Such passivation very often serves as a support for further functional layers in top-down microelectronic technologies. It should be noted that the passivation of electrode materials allows a reduction in requirements relating to their thermodynamic stability. In particular, the indicated approach is used in micro-hotplate fabrication. As a result most micro-hotplate designers consider polycrystalline silicon doped with boron or phosphorus impurities to be a very appropriate material for making heaters and temperature sensors because, with capsulation covering, it is stable up to 1,000 °C (Panchapakesan et al. 2001 Hwang 

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Amar lA, Lan R, Petit CTG, Tao S (2011) Solid-state electrochemical synthesis of ammonia a review. J Solid State Electrochem 15 1845-1860 

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