Materials for Functional Layers

Applications in which the electrical connections of the sensing element are made by soldering are rare, Ni can be used as contact material in such applications [6], To protect Ni against oxidation, it is often covered by a very thin layer of Au [6], Most applications make use of bond contacts of A1 or Au wires. Frequently used contact materials include Ni (A1 wire), Al, or Au. NiCr is a good adhesion layer for Ni. Therefore, Ni is a popular contact material for NiCr layers, which can then function simultaneously as both a sensing and an adhesion layer. However, Au is used for most automotive applications, because it is the most stable against corrosion. Ti and NiCr are suitable adhesion layers for Au. 

Etching. After a resist is patterned on a wafer, the exposed or unwanted substrate is removed by etching processes. Subsequentiy the resist is removed, leaving a desired pattern in a functional layer of the integrated circuit. Etching is performed to pattern a number of materials in the IC fabrication process, including blanket polysiHcon, metal layers, and oxide and nitride layers. The etch process for each material is different, and adapted to the material requirements of the substrate. 

Patterns of ordered molecular islands surrounded by disordered molecules are common in Langmuir layers, where even in zero surface pressure molecules self-organize at the air—water interface. The difference between the two systems is that in SAMs of trichlorosilanes the island is comprised of polymerized surfactants, and therefore the mobihty of individual molecules is restricted. This lack of mobihty is probably the principal reason why SAMs of alkyltrichlorosilanes are less ordered than, for example, fatty acids on AgO, or thiols on gold. The coupling of polymerization and surface anchoring is a primary source of the reproducibihty problems. Small differences in water content and in surface Si—OH group concentration may result in a significant difference in monolayer quahty. Alkyl silanes remain, however, ideal materials for surface modification and functionalization apphcations, eg, as adhesion promoters (166—168) and boundary lubricants (169—171). 

In this paper, we presented new information, which should help in optimising disordered carbon materials for anodes of lithium-ion batteries. We clearly proved that the irreversible capacity is essentially due to the presence of active sites at the surface of carbon, which cause the electrolyte decomposition. A perfect linear relationship was shown between the irreversible capacity and the active surface area, i.e. the area corresponding to the sites located at the edge planes. It definitely proves that the BET specific surface area, which represents the surface area of the basal planes, is not a relevant parameter to explain the irreversible capacity, even if some papers showed some correlation with this parameter for rather low BET surface area carbons. The electrolyte may be decomposed by surface functional groups or by dangling bonds. Coating by a thin layer of pyrolytic carbon allows these sites to be efficiently blocked, without reducing the value of reversible capacity. 

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