Material removal mechanism applications

In situ ATR-FTIR spectroscopy also provides a unique way to analyze the surface of the target material during polishing. The information obtained can help to improve the understanding of material removal mechanism and other chemical processes in CMP, for example interactions of additives like amino acids or effects of the pH value. The presented technique using mSRE is applicable to all kinds of dielectric materials like Si nitride, low-k materials and even very thin metallic films. With the appropriate technical effort, it could be used for EPD as well as for miniaturized spectrometer systems as described in Section 14.3.2 in process control. 

As far as passivating film is concerned, in principle as shown in Fig. 8.1, the native copper oxide structures formed in the presence of a strong oxidizer under certain pH conditions can serve the purpose for many applications. For CMP purposes, such a hard surface film does not usually lead to any meaningful material removal under the mechanical forces exerted by a polishing pad. Therefore, there is a need to build a soft passivating layer on a copper film softened by the complexing agent. The most commonly used... 

The bursters removed from the munitions are then sheared to access the energetic materials. The sheared burster parts and fuzes are then transferred to the ERH. The shearing step is a mechanical cutting operation involving shearing equipment used in the baseline disassembly process and in nonchemical weapons applications. All propellant material removed either from the storage containers or from the munitions is fed into the ERH along with the fuzes and sheared bursters. 

Commercial membranes for CO2 removal are polymer based, and the materials of choice are cellulose acetate, polyimides, polyamides, polysulfone, polycarbonates, and polyeth-erimide [12]. The most tested and used material is cellulose acetate, although polyimide has also some potential in certain CO2 removal applications. The properties of polyimides and other polymers can be modified to enhance the performance of the membrane. For instance, polyimide membranes were initially used for hydrogen recovery, but they were then modified for CO2 removal [13]. Cellulose acetate membranes were initially developed for reverse osmosis [14], and now they are the most popular CO2 removal membrane. To overcome state-of-the-art membranes for CO2 separation, new polymers, copolymers, block copolymers, blends and nanocomposites (mixed matrix membranes) have been developed [15-22]. However, many of them have failed during application because of different reasons (expensive materials, weak mechanical and chemical stability, etc.). 

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