Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Magnetron Cluster Source with a Magnetic Sector at HZB

10 Magnetron Cluster Source with a Magnetic Sector at HZB [Pg.53]

FIGURE 3.16 Schematic of the cluster deposition apparatus at the Johns Hopkins University. Reprinted with permission from Ref. [107]. American Chemical Society. [Pg.54]

11 Mi etron Sputtering Source with a Quadrupole Mass Filter at the Technical University of Denmark [Pg.54]

SEARCH

A clustering

Cluster source

Clusters cluster source

Clusters magnetic

Clusters magnetism

Magnetic sector

Magnetron cluster source

Sectorization

© 2024 chempedia.info