Magnetron cluster source

FIGURE 3.3 Schematic image of a magnetron cluster source. Reprinted with permission from Ref. [60]. American Institute of Physics. (See insert for color representation of the figure.) 

---

Magnetron Cluster Source with a Lateral TOF Mass Filter at the University of Birmingham... 

Magnetron Cluster Source with a Magnetic Sector at Johns Hopkins University... 

The cluster deposition apparatus at the group of Heinz Hovel uses a magnetron cluster source and a lateral TOF mass filter for cluster generation and mass selection. A cluster current of tens of pA is reported with a resolution greater than 50 for the lateral TOF mass filter. A cryopump is placed between the cluster source and mass... 

Fig. 1.3. Schematic representation of the NC200U nanocluster source designed at the University of Freiburg and distributed by Oxford Applied Research. Depending on magnetron power, aggregation length, aperture size, and rare gas flow rate, the clustering can be influenced. For Cu , the maximum cluster current can be changed from Cu2o up to Cuisoo...

---