Linear resolution

Resolution is perhaps the most important parameter in lithography, which drives the whole industry forward. However, the definition of resist resolution is elusive at least in part due to the fact that the resolution depends heavily on exposure tools also. When the resolution is mentioned, NA of the stepper lens and exposing wavelength should accompany in photolithography as the resolution (R) is proportional to the exposing wavelength (A) and inversely proportional to NA of the lens R=k1A/NA. 

Furthermore, small features can be printed by over- or underexposure (or by over- or underdevelopment) in many cases, which is not a true representation of resolution. Linear resolution is defined as the smallest feature printed while all other feature sizes are also delineated within 10% of the designed mask sizes (Fig. 174). 

A number of optical techniques to enhance resolution have been proposed and have played an important role in extending the resolution and life of optical lithography, although they cannot be applied to any pattern sizes or shapes but are pattern-dependent. These techniques include annular and off-axis illumination, phase shift masks, multiple exposures, etc. [505]. 

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Selection of the measuring principle is mainly determined by the requirements of the measuring task. A comparison of the specifications for linearity, resolution, band with and temperature stability will qualify one or the other principle. In com-... 

Next comes the sputter deposition of the alumina gap layer, made about 0.1 to 0.5 fim thick. The gap layer thickness greatly affects the linear resolution and side read/write effects of the recording heads. 

The main characteristics describing the performance of SPR (bio)sensors include sensitivity, linearity, resolution, accuracy, reproducibility, dynamic range, limit of detection, and limit of quantification. 

For O and H, x = 3.4 and 2.2, respectively, showing that each O-H bond is polar in the sense -H. Since the H2O molecule is non-linear, resolution of the two bond vectors gives a resultant dipole moment which acts in the direction shown in structure 2.24. In addition, the O atom has two lone pairs of electrons which will reinforce the overall moment. The experimental value of p for H2O in the gas phase is 1.85 D. 

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