Joining and Sealing

2 Menz, W. and Mohr, J. (1997) Mikrosystemtechnik filer Ingenieure, Wiley-VCH Verlag GmbH, Weinheim, Germany. 

3 Eigler, H. and Beyer, W. (1996) Modeme Produktionsprozesse der Elektrotechnik, Elektronik und Mikrosystemtechnik, Expert Verlag, Renningen, Germany. 

6 Knitter, R. and Dietrich, T. (2006) Advanced Micro ej Nanosystems Micro Process Engineering, vol. 5 (eds H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J. Korvink and O. Tabata), Wiley-VCH Verlag GmbH, Weinheim, Germany, Chapter 12. 

7 Petzow, G. (1994) Metallographisches, Keramographisches und Plastographisches Atzen, Gebriider Borntrager, Berlin, Germany. 

8 Harris, T.W. (1976) Chemical Milling, Clarendon Press, Oxford, UK 

Another possibility of ceramic material application is the use of coatings and foams inside, for example, metallic microstructure devices. Here, well-known technologies such as CVD processes, sputtering, electrophoretic deposition, sol-gel methods in combination with spin coating, dip coating, or wash coating methods, or the use of anodic oxidation for aluminum-based devices will lead to either dense, protective ceramic coatings or porous layers used as catalyst support. 

1 Madou, M. (1997) Fundamentals of Microfabrication, CRC Press, Boca Raton, FL. 

---

Fig. III.3. Joining and sealing thermoplastic tubing, (a) End-to-end seal between tubes of identical diameter (b) end-to-end seal between tubes of different diameter (c) closed-end seal.

Silicone adhesives cure without the application of heat or pressure to form permanently flexible silicone rubber. The rubber remains flexible despite the exposure to high or low temperatures, weather, moisture, oxygen, ozone, or UV radiation. This makes them useful for joining and sealing joints in which considerable movement can be expected, such as intermediate layers between plastics and other materials of construction (e.g., acryUc glazing). Several types of silicone adhesives/sealants are available, including one-part and two-part systems. 

Figure 2.13 Microchannels covered by an alumina layer obtained with the sol el technique. 2.3.1.1 Joining and Sealing...

Thermal welding is the joining and sealing of thermoplastic garment materials without the use of adhesives or other means (sewing, staples, other fasteners). There is... 

---