Inorganic resist deposition

K. Balasuhramanyam and A.L. Rouff, Oblique deposition enhanced sensitivity in electron beam exposed g Ge Sei inorganic resist, J. Vac. Sci. TechoL, 19(4), 1374 (1981). 

Matsuda and co-workers [39-41] proposed the addition of some inorganic ions, such as Mg2+, Zn2+, In3+, Ga3+, Al3+,and Sn2+, to PC-based electrolytes in order to improve cycle life. They observed the formation of thin layers of Li/M alloys on the electrode surface during the cathodic deposition of lithium on charge-discharge cycling. The resulting films suppress the dendritic deposition of lithium [40, 41]. The Li/Al layer exhibited low and stable resistance in the electrolyte, but the... 

Hence, Tct is seen to increase with pore density and pore radius. However, a problem appears at a porous substrate when thin films are to be deposited during metallization to form interconnections, thin-film capacitors, etc.335 Sputtered material falls deep into the pores, which affects the planarity of the deposited layer and the electrical resistivity of the oxide layer underneath.335 To cope with this effect, the porous oxide should be padded by inorganic (A1203 and Si02) or organic (polyimide, negative photoresist) layers. 

Nickel is a silver-white, lustrous, hard, malleable, ductile, ferromagnetic metal that is relatively resistant to corrosion and is a fair conductor of heat and electricity. Nickel is a ubiquitous trace metal that occurs in soil, water, air, and in the biosphere. The average content in the earth s crust is about 0.008%. Nickel ore deposits are accumulations of nickel sulfide minerals (mostly pentlandite) and laterites. Nickel exists in five major forms elemental nickel and its alloys inorganic, water-soluble compounds (e.g., nickel chloride, nickel sulfate, and nickel nitrate) inorganic, water-insoluble compounds (e.g., nickel carbonate, nickel sulfide, and nickel oxide) organic, water-insoluble compounds and nickel carbonyl Ni(CO). ... 

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