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Hydrogen Migration and Solubility in Silicon

Department of Applied Physics Stanford University Stanford, California [Pg.225]

Xerox Palo Alto Research Center Palo Alto, California [Pg.225]

This chapter is devoted to the energetics and kinetics of the incorporation of hydrogen into the simplest and most studied of its possible hosts, crystalline silicon of high perfection containing known concentrations of shallow donor or acceptor impurities. It undertakes to review what has been learned from experiments about the phenomenological parameters [Pg.225]

Copyright 1991 by Academic Press, Inc. All rights of reproduction in any form reserved. [Pg.225]


HYDROGEN MIGRATION AND SOLUBILITY IN SILICON 279 data for the two ends of the range of measurement, we find... [Pg.294]


See other pages where Hydrogen Migration and Solubility in Silicon is mentioned: [Pg.23]    [Pg.240]    [Pg.243]    [Pg.258]    [Pg.268]    [Pg.298]    [Pg.308]    [Pg.312]    [Pg.314]    [Pg.358]    [Pg.362]    [Pg.364]    [Pg.299]    [Pg.8]    [Pg.225]    [Pg.227]    [Pg.228]    [Pg.229]    [Pg.231]    [Pg.233]    [Pg.235]    [Pg.237]    [Pg.239]    [Pg.241]    [Pg.243]    [Pg.245]    [Pg.247]    [Pg.249]    [Pg.251]    [Pg.253]    [Pg.255]    [Pg.257]    [Pg.259]    [Pg.261]    [Pg.265]    [Pg.267]    [Pg.269]    [Pg.271]    [Pg.273]    [Pg.275]    [Pg.277]    [Pg.281]    [Pg.283]    [Pg.285]    [Pg.287]    [Pg.289]    [Pg.291]    [Pg.293]   


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Hydrogen in silicon

Hydrogen migration

Hydrogen, solubility

Hydrogenated silicon

Migration and

Migration silicon

Silicon solubilities

Silicones migration

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