Hybrid beam deposition

Properties of arsenic-doped p-type ZnO grown by hybrid beam deposition. Applied Physics Letters,... 

Ryu, Y.R., Lee, T.S. and White, H.W. (2003) Properties of arsenic-doped p-type ZnO grown by hybrid beam deposition. Applied Physics Letters, 83, 87. 

Ryu et al. [60] used a hybrid beam deposition (HBD) method to attain layers. This method collectively employs some features of PLD, MBE, and chemical vapor deposition (CVD). Plasma created by laser ablation from a metal oxide target and oxygen from an RF-plasma source are used concomitantly for increased reactive oxygen flux. For doping purposes, evaporation of solid sources as in the case of M B E or gas sources as in the case of MBE or CVD were used. Ryu et al. [15] applied the Be2.Zni, 0/Zn0 heterojunction system to produce electroluminescence from what... 

The hybridizing component can also be formed directly on the surface of a pristine or modified nanocarbon using molecular precursors, such as organic monomers, metal salts or metal organic complexes. Depending on the desired compound, in situ deposition can be carried out either in solution, such as via direct network formation via in situ polymerization, chemical reduction, electro- or electroless deposition, and sol-gel processes, or from the gas phase using chemical deposition (i.e. CVD or ALD) or physical deposition (i.e. laser ablation, electron beam deposition, thermal evaporation, or sputtering). 

The deposition mechanism of a-C and a-C H with ion beams involves subplantation of incident atoms. The ion bombardment produces a denser but a less stable sp a-C phase. An atom s hybridization will readily adjust to the local density where the density and the sp fraction pass through a maximum as a function of the ion energy [25], It is not yet clear how the flux of carbon controls the sp lsp ratio in ion beam or in chemical vapor deposition. It is found that a-C films deposited from a pure C" ion beam have a maximal density and sp content for ion energies between 30 and 50 eV. As the collisions between C ions create vacancies. 

Starting point for device fabrication are planar waveguides. They can be synthesized in different ways such as sputtering, evaporation, molecular beam epitaxy, etc. However, one of the most simple method is the spin coating technique which allows deposition of polymeric and hybrid materials quite simply and with very good homogeneity even on large substrates. 

A generalization of this approach is to deposit a quarterwave dielectric mirror onto a metal reflector. In this way, very high reflectance is obtained for near-normal incidence. For more oblique incident angles the aU-dielectric part will be transmissive, but in that case the metal part will reflect these beams, albeit with a lower reflectance. In this way the benefits of both types of the used structures are simultaneously employed. In [251] the authors mention the use of hybrid reflectors consisting of a Bragg-type dielectric mirror with an additional thin metal reflector deposited on its backside. 

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