Hardware parameters, resist

TABLE III. Hardware Parameters that Determine the Sensitivity and Contrast Requirements of a Resist. 

Research areas where a chemical engineer can expect to make the most contributions are primarily in resist processing. Here, the major engineering considerations often entail basic conservation laws for mass, momentum and energy, polymer physics, thermodynamics, and transport properties in polymeric matrices. An excellent review has been written by Thompson and Bowden (3) to address the issues encountered in individual unit operations. A few of the many topics discussed in their review will be selected here for a more in-depth examination. Hardware parameters such as lens imperfections, source stability, mask quality and dimensions, contamination and mechanical stability do not fall in the scope of the present discussion. This paper will concentrate on events and research challenges require a firm understanding of material... 

In addition, there are four other resist-related criteria, viz., adhesion, shelf life, supply and quality assurance that must be taken into account. Lithographic performance with respect to these parameters is dictated and/or limited by the hardware, materials, and processing used to generate the requisite pattern as summarized in Table I. 

They are several concerns when designing an EMI filter. The parameters of the EMI filter examined in this book reflect these concerns. If the EMI filter is to be used on a converter, the input impedance of the converter must be greater than the output impedance of the filter at all frequencies. It is good practice to allow 6 dB of margin for this parameter. If the output impedance of the filter gets too close to the input impedance of the converter, there can be problems with the stability of the converter. It may be important to note here that this output impedance is sensitive to the effective series resistance (ESR) of the output capacitors. For the hardware data taken for this unit, tantalum capacitors, which have unspecified ESR, were used. The ESR of a similar capacitor was measured for the simulations. 

In addition to the sample concentration and specific parameters related to the pulse sequence being used, the spectral signal-to-noise ratio (SNR) depends on various components of the spectrometer hardware, in particular the sensitivity of the probe and preamplifier. The SNR can be related to the temperature of the receiver coil ( Tq), its resistance (Rc), the temperature of the sample (Tg), the resistance added to the coil by the sample (i s), and the noise temperature of the amplifier (TA) by the following equation 7... 

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