Glow discharge inert gases

Schematically the apparatus used for sputtering consists of a bell jar maintained at a reduced pressure of an inert gas such as argon. The gas is subjected to a potential difference of several kilovolts, producing a glow discharge from which positive ions are accelerated towards the target (the cathode). These high-energy ions remove...

As shown in Figure 3.1, in a low-pressure glow discharge of an inert gas, the electric potential in the majority of space between the electrodes, except in the vicinity of the cathode, is nearly constant. If we take the distance along the axis of a tube as x. 

When an organic vapor rather than an inert gas is used in the same discharge reactor, a nearly completely different phenomenon occurs, in which deposition of material is an aspect. Deposition of material constitutes the foundation of LCVD. In an LCVD environment, the composition of the gas phase changes continuously as deposition proceeds. This difference could be further illustrated by examples for glow discharge of argon and of acetylene. 

Because the glow-discharge creates a cloud of sputtered atoms in a low-pressure, rare-gas environment that is an excellent quenching medium, it is an effective source for atomic fluorescence. In addition, the inert gas acting as diluent poses few chemical interferences and the elemental absorption lines are relatively narrow. It should be noted that GD-AF has not been used to the same extent as other GD techniques, however. 

DART uses a glow discharge plasma to excite a heated stream of inert gas, usually nitrogen or helium, which is directed onto the surface to be analyzed. These excited state atoms and molecules have been shown to effect,... 

Glow Discharge Lamp A low-pressure discharge in an inert gas, characterized by abnormal glow and sputtering of solid sample cathodes. solids, residues 10,000... 

Consider the kinetics of the plasma process starting with decomposition of hydrocarbons in low-pressure glow discharges, which initiates polymerization (Yensen, Bell, Soong, 1983 Ivanov Epstein, 1984 Ivanov, 1989 Ivanov, Rytova, Soldatova, 1990a Ivanov et al, 1990b). If the initial concentration of hydrocarbons mixed with an inert gas exceeds 10-20 vol %, dissociation of hydrocarbons is mostly due to electronic excitation by direct... 

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