Gas phase diagnostics

Eckbreth, A. G., and Schreiber, P. W. "Coherent Anti-Stokes Raman Spectroscopy (CARS) Application to Combustion and Gas-Phase Diagnostics." Chemical Applications of Nonlinear Raman Spectroscopy in Laser Applications, Vol. 1. New York Academic Press, 1981. 

In situ Gas-Phase Diagnostics by TOF MS with Laser Ionization... 

The apparatus for in situ gas-phase diagnostics consists of three chambers, the processing chamber for thin-film deposition, a differential pumping stage, and an analysis chamber with a time-of-flight (TOF) mass spectrometer (MS) with pulsed laser ionization (Figure 3.1). 

Several gas-phase diagnostic studies have been performed especially on the hot-filament CVD process in an attempt to analyze the spatial distribution of stable and reactive species in the region between filament and substrate and to obtain information about the decisive steps in the diamond formation mechanism. One of the first quantitative investigations of this kind was performed by Celii et al. using tunable infrared-laser detection of methane, acetylene, ethylene and methyl [54,551. Aside from a considerable conversion of methane (starting concentration 8 X 10 " cm ) to acetylene (2 x lO cm" ) near the hot filament (tungsten, 2200°C), methyl radicals were found with a concentration of 2 x lO cm". ... 

A.C. Eckbreth, P.W. Schreiber Coherent anti-Stokes Raman spectroscopy (CARS) Applications to combustion and gas-phase diagnostics, in Chemical Applications of Non-Linear Raman Spectroscopy, ed. by A.B. Harvey (Academic, New York 1981)... 

PtiRETZKY, A. A. Geohegan, D. B. Gas-phase diagnostics and LIF imaging of 3-hydroxypicolinic acid MALDI matrix plumes. Chem. Phys. Lett. 1997, 286, 425-132. 

I., Using micro heat exchangers as diagnostic tool for the process optimization of a gas phase reaction, in Proceedings of the VDE World Microtechnologies Congress, MICRO.tec 2000,... 

Rase HF (1990) Fixed-Bed Reactor Design and Diagnostics-Gas Phase Reactions, Butterworths. 

A brief description of the key plasma diagnostic techniques, which have been especially useful in delineating the gas phase processes in fluorocarbon plasmas, will be given followed by an extensive discussion of plasma etching and polymerization mechanisms. 

W.G. Breiland, M.E. Coltrin, and P. Ho. Comparisons between a Gas-Phase Model of Silane Chemical Vapor Deposition and Laser-Diagnostic Measurements. J. Appl. Phys., 59 3267-3273,1986. 

Reaction intermediates formed in the nitration of a series of a,/i-unsaturatcd esters, such as (47), with N02BF4 have been reported to exhibit the expected behaviour of a-carbonyl cations. Three diagnostic reaction types were observed (1) Ritter reaction (2) cyclopropane formation from propyl cations (3) Wagner-Meerwein migration of alkyl groups. Semi-empirical calculations of the relative gas-phase stabilities of the proposed intermediate cations have also been performed.53... 

In the gas phase, the chemistry of radical cations generated from >C=0 containing species is well-documented, especially in the field of mass spectrometry where a number of diverse and particularly diagnostic processes are known such... 

The experimental aspects of neutral plasma gas-phase chemistry are very similar to those discussed above in conjunction with MOVPE. The development of in situ diagnostics and kinetic studies are needed to unravel the complex free radical-dominated gas-phase chemistry. The unique aspects of plasma processing stem from the transport and reactions of charged species. Besides providing insight into the underlying fundamentals, tech-... 

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