Gallium arsenide trace analysis

The interpretation of SSMS data falls into two distinct areas — element Identification and estimates of quantity. The criteria used in our laboratory for positive elemental identification are the presence of the doubly ionized species and the Identification of the Isotopic pattern when possible. Quantitation will be discussed later. Last, the Instrument source must be cleaned regularly to avoid memory problems. Our approach to the memory problem is to have a complete set of source parts for each matrix. A set of parts are dedicated for silicon analyses, another for gallium arsenide, etc. These parts and the source Itself are cleaned on a regular and frequent basis. When these factors are under control, SSMS has proved to be a reliable, reproducible technique for the bulk analysis of trace impurities. 

Becker, J.S., Soman, R.S., Becker,T., Panday,V.K., Dietze, H. (1998) Trace and ultratrace analysis of gallium arsenide by different mass spectrometric techniques. Journal of Analytical Atomic Spectrometry, 13, 983-987. 

Mowat, I., Lindley, P, McCaig, L. (2003) A correlation of TOF-SIMS and TXRF for the analysis of trace metal contamination on silicon and gallium arsenide. Applied Surface Science, 203-204,495 99. 

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