Gallium-aluminum-arsenide deposition

LED materials include gallium arsenic phosphide, gallium aluminum arsenide, gallium phosphide, gallium indium phosphide, and gallium aluminum phosphide. The preferred deposition process is MOCVD, which permits very exacting control of the epitaxial growth and purity. Typical applications of LED s are watches, clocks, scales, calculators, computers, optical transmission devices, and many others. 

The trimethylamine adduct of aluminum hydride (alane) has been of recent interest as a precursor for the chemical vapor deposition (CVD) of aluminum metal1 and aluminum gallium arsenide thin films.2 Because of the absence of aluminum-carbon covalent bonds in the precursor, carbon incorporation in the resulting films can be suppressed significantly. In addition, the deposition temperature can be lowered. 

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