Frustrated total internal reflection FTIR

The Raman scattering is known as a powerful tool for investigation of the SPP and IPP modes. It is more direct method to study these modes than the frustrated total internal reflection (FTIR) [3], initially used for the purpose, as far as the Raman spectra are measured for undisturbed surfaces and can be much easier interpreted. 

ATR has been found as an easy to use, non-destmctive and surface-sensitive IR sampling technique for the in situ investigation of CMP processes (Hind et al., 2001). It was initially pushed by Harrick (1967) and comprehensively treated in his early book and following editions together with Mirabella (1985). Numerous alternative and partially deceptive names are used instead of ATR spectroscopy internal reflection spectroscopy, evanescent wave spectroscopy, frustrated total internal reflection (FTIR, which should not to be confused with Fourier-transform infrared spectroscopy) and multiple internal reflection (MIR, which should not to be confused with mid-infrared )- Therefore, in the following the term ATR as defined in Section 14.4.1 and illustrated with Figure 14.8 is used exclusively. 

Attenuated total reflection (ATR) has grown into the most widely practiced technique in infrared spectrometry. The reasons for this are fairly straightforward the technique requires little or no sample preparation, and consistent results can be obtained with relatively little care or expertise. The technique is not foolproof, but it can be very forgiving. ATR spectrometry is known by a number of alternative names, for example, multiple internal reflection (MIR), which is not to be confused with mid-infrared, frustrated multiple internal reflection (FMIR), evanescent wave spectrometry (EWS), frustrated total internal reflection (FTIR), which is not the same as Fourier transform infrared (FT-IR) spectrometry, and internal reflection spectrometry (IRS), but IRS is better known, at least in the United States, as the Internal Revenue Service. 

We would also like to note the reason for the hyphen between FT and IR throughout the book. This is to distinguish Fourier transform infrared spectrometry from frustrated total internal reflection, FTIR is now an infrequently used term for... 

FTIR Fourier transform infrared frustrated total internal reflection... 

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