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Fabry-Perot interferometer in the PolyMUMPS process

A Fabry-Perot interferometer is formed by an adjustable optical cavity between two partially reflecting mirrors, as shown schematically in [Pg.86]

The distance between the mirrors can be adjusted with a MEMS actuator to enable a tunable interferometer. When the distance between the mirrors is adjusted to 2/2, the light passes through the interferometer while light with other wavelengths is blocked. The Fabry-Perot interferometer acts as a narrow bandpass filter for light, with the bandpass is dependent on the finesse of the optical cavity. [Pg.87]

For light that is incident normally on a Fabry-Perot filter with a mirror separation d and index n in the cavity between the mirrors, the transmission function is given by [Pg.88]

While not the optimal layer thickness for the Bragg stack, which would have dielectric layer thicknesses that are one-quarter of the wavelength of light that is to be filtered, it makes good use of the available layers in the [Pg.90]

The top mirror support is four springs acting in series. Each individual spring is comprised of a set of three fixed-guides beams connected end-to-end and acting in parallel. [Pg.91]


See other pages where Fabry-Perot interferometer in the PolyMUMPS process is mentioned: [Pg.86]    [Pg.87]    [Pg.88]    [Pg.89]    [Pg.91]    [Pg.86]    [Pg.87]    [Pg.88]    [Pg.89]    [Pg.91]   


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