Exposure curve

Figure 6. Exposure curves of positive resist Hitachi Chemical R1-7000P with and without the Dl-CEL. The contrast (r-value) of the Dl-CEL resist is three times of that of the non-CEL resist.

The exposure curve of the two-layer resist based on the doping process is shown in Figure 8. The two-layer resist system has a high contrast and high resolution capability. Submicron line-and-space patterns are obtained using this two-layer resist system (Figure 9). 

Figure 8. Exposure curve for a negative two-layer resist system formed by doping. Exposure was performed at the i-line(365nm).

Figure 11. Exposure curve of the acid-catalyzed resist system consisting of poly(4-hydroxystyrene), D2, and...

Figure 30. Exposure curves for COP negative electron resist on three substrate materials.

When reporting the sensitivity of a resist, all of the parameters used in the processing should be stated and an exposure curve given. Unfortunately such detail is often omitted in the literature, making comparison of resist sensitivities difficult if not impossible. 

Acres et al. (22) have speculated on the modes of phosphorus and lead poisoning in monolithic catalysts, based on data obtained in simulated aging. Conversion vs. time-of-exposure curves for catalysts poisoned by either lead or phosphorus show quite different shapes, which the authors attribute to pore-mouth poisoning for phosphorus, and uniform poisoning... 

Films of PMMA with 20 to 30% poly(epi-chlorohydrin) require only 1/2 to 1/4 the exposure to produce patterns compared to PNNA alone. Thinning-exposure curves also suggest a sensitivity increase of 3 or 4 times. Contrast suffers somewhat, but patterns are producible when a nitride-supported gold mask is used. 

Cumulative exposure curve for a population showing an exposure ( x axis) for a given percentile ( y axis) (Hoknes et al. 2005). 

It should be possible to derive a cumulative exposure curve for the whole of the population and, ideally, for consumers only. It is desirable to obtain estimates of exposure for any selected sub-set of the population, to ensure adequate protection of vulnerable groups. Depending upon the quality of the food consumption survey and associated data this may or may not be easy to achieve. If non-consumers are included in an exposure estimate, as is the case in typical per-capita estimates, then the estimate of exposure will be below the actual exposure and the amount of under-estimating will depend upon the ratio of non-consumers to consumers. 

Figure 3. A typical development vs. relative log exposure curve or D vs. log E curve.

Fio. 10. Curve 1 Work function versus logjo exposure. Curve 2 Intensity of 27-volt beam from single-spaced, simpled-square structure as a function of logi, exposure. Multiply the ordinate scale by 4. Curve 3 Intensity of 22-volt beam from a nickel-oxide lattice as a function of logjo exposure. [From Farnsworth and Madden (27).]... 

Figure I. Effects of ozone on butadiene I styrene block copolymer. Areas of ozone exposure curves (time in minutes vs. concentration ppm) for all specimens in figure are equivalent. Key to ozone treatment , untreated cs, 975ppm for 33 min , 375ppm for 75 min and +, HO ppm for 223 min.

Figure 2. Effects of ozone exposure on critical surface energy. Exposure curve units are ppm-min. Key , butadiene o, crosslinked butadiene and+, 75/25 butadiene/styrene random copolymer.

Equation (12.140) is the integral form of the lumped parameter model. With this equation, it is possible to generate a normalized CD versus exposure curve, as long... 

Figure 5.24. Various hypotheses for microbial death rate strictly exponential form, curve I sudden death after a certain time of exposure, curve IV or curves II and III due to inequalities among cells in a population (Hinshelwood, The Chem. Kinetics of the Bacteria Cell, 1946, Oxford University Press.)...

---