Examples of Sol-Gel Deposited Ultrathin Dielectric Films

Added Value of Ultrathin Films from Downscaled Chemical Solution Deposition 

After having set the general framework for ultrathin film fabrication using downscaled chemical solution deposition in the previous section, hereafter we will discuss specific examples of dielectric films deposited in this manner. We will briefly mention different chemistries that have been used and several materials that are deposited using diverse substrates, thereby illustrating the versatility of this deposition route. 

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