Electronics industry, ultra-high-purity

Boron trichloride is also available in ultra high purity grades for use in the electronics industry. Gas purity guidelines have been developed and published by the Semiconductor Equipment and Materials International and can be found in the Book of SEMI Standards [1]. 

The critical applications in the electronics industry are the production of ultra-pure water for the washing of semi-conductor material (silicon chips), and the cleaning of the chemical fluids (liquid and gaseous) used in their manufacture. The object of an ultra-pure water plant for semi-conductor manufacture is to produce water as close to the theoretical purity as possible. Users of ultra-pure water should take all steps possible to ensure that the filters selected meet the highest standards of quality and performance. Every fluid that comes into contact with integrated circuit surfaces is a potential sonrce of the contamination that will affect yields. For this reason, filtration of these fluids at the point of use is essential to obtain high yields. All chemicals that contact microcircuits should be filtered to a level of at least 0.2 pm. 

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