Electron cyclotron resonance ion sources

Geller, R. Electron Cyclotron Resonance Ion Sources and ECR Plasmas Institute of Physics Publishing Bristol, 1996. 

G. Douysset, H. Khodja, A. Girard, J.P. Briand, Highly charged ion densities and ion confinement properties in an electron-cyclotron-resonance ion source, Phys. Rev. E 61 (3) (2000) 3015-3022. 

Brown, I.G. The Physics and Technology of Ion Sources, WUey-Intersdence New York, 1989. Geller, R. Electron Cyclotron Resonance Ion Sources and ECR Plasmas Institute of Physics Publishing Bristol, 1996. 

Some ion sources and fusion facilities in the plasma plane. PIG Penning Ion Gauge, ECRIS Electron Cyclotron Resonance Ion Source, EBIS/EBIT Electron Beam Ion Source or Trap, laser plasma produced by laser ablation in solids, tokamak fusion device of light ions, fully stripped uranium ion... 

Tinschert K, lannucci R, Lang R. (2008) Electron cyclotron resonance ion sources in use for heavy ion cancer therapy. Rev Sci Instrum 79 02C505. 

Kidera, M., Seto, Y., Takahashi, K., et al., 2011. New method for comprehensive detection of chemical warfare agents using an electron-cyclotron-resonance ion-source mass spectrometer. Spectrochim. Acta A 78,1215-1219. 

Microwave discharges at pressures below 1 Pa witli low collision frequencies can be generated in tlie presence of a magnetic field B where tlie electrons rotate witli tlie electron cyclotron frequency. In a magnetic field of 875 G tlie rotational motion of tlie electrons is in resonance witli tlie microwaves of 2.45 GHz. In such low-pressure electron cyclotron resonance plasma sources collisions between tlie atoms, molecules and ions are reduced and the fonnation of unwanted particles in tlie plasma volume ( dusty plasma ) is largely avoided. 

For GaN-based semiconductor lasers with a stripe geometry, it is necessary to fabricate a smooth and vertical facet for the resonator, which has been reported by Saotome et al [32,33] and Itaya et al [34], The RIBE system used in this study has an electron cyclotron resonance (ECR) ion source, and ECR plasma is generated by introducing a 2.45 GHz microwave into a horizontal discharge chamber on... 

Table 11.1. Physical properties of hydrocarbon films deposited with a remote electron cyclotron resonance plasma from three different C2Hz source gases at three different dc self-bias voltages 1% np represents the parallel component of the real part of the refractive index as measured by in situ ellipsometry. The film composition is obtained from ion-beam analysis. The total particle number densities nc and n-H are calculated from the stoichiometry and the film thickness. Deposition parameters pressure p = 0.2 Pa adjusted with gas flow at constant pumping speed, absorbed microwave power density P = 10 kW nT3 [17]...

At Argonne, a new positive ion injector for ATLAS based on an electron cyclotron resonance (ECR) plasma ion source is under construction (40). The... 

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