Disturbances during processing

CL Stork, DJ Veltcamp, and BR Kowalski. Identification of multiple sensor disturbances during process monitoring. Analytical Chemistry, 69 5031-5036, 1997. 

CMP processes also leave a metallic contamination typically in the 10"-10 at/cm range. These contaminants arise from the outcropping metals, the slurries, and the mechanical environment of the polishers. In front-end applications (STI), these levels are prohibited because they are not compatible with the following hot processes. In the case of back-end steps, these parasitic metals must be removed as well, even if this seems more paradoxical with the use of metallization steps. Indeed a large amount of charges at the interconnection level or the presence of mobile ions such as sodium or potassium can induce disturbances during the electrical information transfer. Furthermore, a superficial conductive metallic contamination can generate shorts between two adjacent lines by percolation conduction mechanism. And last but not least, fast diffusers such as copper can reach... 

Embryonic tumors (T4) that arise in the fetus or in young children frequently show a mixed population of differentiated and undifferentiated cells. This evidence suggests that the tumors may result from developmental disturbances during organogenesis that cause arrest of an early stage in the normal differentiation process to adult tissue. Enhanced expression of the N-myc oncogene has been... 

In the chemical industry, flares are being used less and less for off-gas purification and more as safety measures, for example, for fast pressure relief or for the disposal of harmful gases during process disturbances. 

The District of Columbia was also informed that in 1992, several workers were overcome during excavation procedures at an adjoining property and hospitalized for respiratory problems. They feel strongly that these workers may have been exposed to poison gas from these broken bottles or leaking munitions disturbed during the excavation process. 

Any debris from fabrication is removed by a process called passivation treatment in which the surface is treated with, typically, a strong acid like nitric acid. The acid treatment results in an oxide film on the surface which is considered to be more stable than the natural air-formed film. Whether this passivated oxidative film should not be disturbed during subsequent handling is stiU debatable. Stainless steel is sterilized by heat or steam with heat. It was reported that steam sterilization also increases its resistance to corrosion (Sutow, 1990). 

---