Dimension Control

Additionally, the following dimensions controlled the minimum shaft length of earlier machines ... 

Cast multibilayers 2D,3D depends on substrate dimensions Controlled evaporation of surfactant deposited on substrates Weeks Viable alternative to LB films 427... 

Sustained release (SR) preparations are not new but several new modifications are being introduced. They are also referred to as long acting or delayed release when compared to rapid or conventional release preparations. The term sometimes overlaps with controlled release, which implies more sophisticated control of release and not just confined to the time dimension. Controlled release implies consistency, but release of drug in SR preparations may not be consistent. The following are the rationale of developing SR ... 

Fig. 5.9 The design of the plastic microchip (a) whole view and (b) cross section of two dams. [10] Reprinted from Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences pTAS 2006, Shinohara H, Mizuno J, Kitagawa F, Otsuka K, Shoji S, Fabrication of Highly Dimension Controlled PMMA Microchip by Hot Embossing and Low Temperature Direct Bonding, 158, 2006, with permission from the Society for Chemistry and Micro-Nano Systems...

As a consequence, the reticle dimension control is a major concern with shrinking critical dimension and tolerance. The difference between the effective mask feature size (the reticle dimension divided by the exposure system reduction factor) and the target developed resist dimension is called the mask bias. 

In 1989, Perkin-Elmer introduced the first step-and-scan system (a hybrid between a stepper and scanning projection system) to address the ever-increasing chip size problem and the ever-more stringent dimension control requirements. These issues were mitigated in the step-and-scan tool through the reduction of the exposure area. Developed under the auspices of a joint venture between IBM and Perkin-Elmer in the mid-1980s, the tool was sold under the brand... 

Y. Haketa, S. Sasaki, N. Ohta, H. Masunaga, H. Ogawa, N. Mizuno, F. Araoka, H. Takezoe, H. Maeda, Oriented salts dimension-controlled charge-by-chaige assemblies from planar receptor-anion complexes. Angew. Chem. Int Ed. 49, 10079-10083 (2010)... 

---