Design approaches to organic bottom antireflection coatings

1 Design approaches to organic bottom antireflection coatings 

The aromatics used in organic BARCs designed for 193-nm and 248-nm lithographies contain dyes that are typically multibenzoid aromatics based on anthran-cene (III) and monobenzoid aromatics based on benzene (IV). Structures (V) and 

248-nm polymeric BARC design antireflection coating architecture (V) 

Bottom anti reflection coatings with polymer-bound dyes that are polymeric at spin-on (VIII). (After R. Dammel. ) 

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