Antireflection coatings design

Aroutiounian, V. M., Martirosyan, Kh. and Soukiassian, P. Reflectance spectrum of diamond-like carbon/porous sihcon donble-layer antireflection coatings designed for silicon solar cells , (2007) Phys. Stat. Sol. (C). 42107-10. 

Figure 1. Simple (a) and more complex (b) stack designs for solar transmitters, reflectors, or thin film PV cells showing the multilayer, multiphase, and multicomponent contributions to S/S and S/G interfaces. G is a grid and AR an antireflection coating in the PV cells.

Modem broadband antireflection coatings generally consist of three to seven layers. The following four layer a.r. coating design on crown glass was created by Shadbolt [58] ... 

Antireflection coatings for infrared materials such as Si, Ge, InAs and InSb have been designed extensively by Cox and various coworkers [59-61]. A commercially available multilayer broadband a.r. system for Ge is shown in Fig.6. For ultraviolet applications, only MgF2 single layers or double layers are used because of the lack of suitable high-index film materials which would satisfy the requirements for half wave films. 

Design approaches to organic bottom antireflection coatings... 

VI), respectively, show the 248-nm and 193-nm polymeric BARC design antireflection coating architectures. Typical examples of monomeric dyes are shown in... 

Almost every single-layer resist system designed for DUV 248-nm (KrF) and DUV 193-nm (ArF lithography) needs some kind of antireflection coating to mitigate... 

---