Deposition Polymerization

Chemical vapor deposition (CVD) is a process whereby a thin solid film is synthesized from the gaseous phase by a chemical reaction. It is this reactive process that distinguishes CVD from physical deposition processes, such as evaporation, sputtering, and sublimation. This process is well known and is used to generate inorganic thin films of high purity and quality as well as form polyimides by a step-polymerization proeess. Vapor deposition polymerization (VDP) is the method in which the chemical reaction in question is the polymerization of a reactive species generated in the gas phase by thermal (or radiative) activation. 

The main objective of the work to be described here is to design and synthesize new organic dielectric materials, and to develop new techniques to deposit these materials as thin, thermally stable films with very low dielectric constants, for use as ILDs. New dielectric materials must not only possess proper electrical, thermal, and mechanical properties but should also minimize or eliminate the use of solvents in this era of concern for environmental pollution. 

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The linear polymer of PX, poly(p-xylylene) (PPX) (2), is formed as a VDP coating in the parylene process. The energetics of the polymerization set it apart from all other known polymerizations and enable it to proceed as a vapor deposition polymerization. 

Blockage of relief device by solids deposition (polymerization, solidification). Possible loss of overpressure protection. 

Polylactides, 18 Poly lactones, 18, 43 Poly(L-lactic acid) (PLLA), 22, 41, 42 preparation of, 99-100 Polymer age, 1 Polymer architecture, 6-9 Polymer chains, nonmesogenic units in, 52 Polymer Chemistry (Stevens), 5 Polymeric chiral catalysts, 473-474 Polymeric materials, history of, 1-2 Polymeric MDI (PMDI), 201, 210, 238 Polymerizations. See also Copolymerization Depolymerization Polyesterification Polymers Prepolymerization Repolymerization Ring-opening polymerization Solid-state polymerization Solution polymerization Solvent-free polymerization Step-grown polymerization processes Vapor-phase deposition polymerization acid chloride, 155-157 ADMET, 4, 10, 431-461 anionic, 149, 174, 177-178 batch, 167 bulk, 166, 331 chain-growth, 4 continuous, 167, 548 coupling, 467 Friedel-Crafts, 332-334 Hoechst, 548 hydrolytic, 150-153 influence of water content on, 151-152, 154... 

Vapor-phase deposition polymerization polyimide synthesis by, 303 PQ and PPQ synthesis by, 312... 

Vapor Deposition Polymerization as a Route to Fluorinated Polymers... 

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