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Vapor deposition polymerized

The linear polymer of PX, poly(p-xylylene) (PPX) (2), is formed as a VDP coating in the parylene process. The energetics of the polymerization set it apart from all other known polymerizations and enable it to proceed as a vapor deposition polymerization. [Pg.431]

Vapor Deposition Polymerization as a Route to Fluorinated Polymers... [Pg.273]

Chemical vapor deposition (CVD) is a process whereby a thin solid film is synthesized from the gaseous phase by a chemical reaction. It is this reactive process that distinguishes CVD from physical deposition processes, such as evaporation, sputtering, and sublimation.8 This process is well known and is used to generate inorganic thin films of high purity and quality as well as form polyimides by a step-polymerization process.9-11 Vapor deposition polymerization (VDP) is the method in which the chemical reaction in question is the polymerization of a reactive species generated in the gas phase by thermal (or radiative) activation. [Pg.277]


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