Deposition magnetic enhancement

FIG. 29. C and N sp- fractions as functions of the nitrogen content in films deposited by magnetically enhanced RFPECVD in CH4-He-N2 atmospheres. (Reproduced from [14].)... 

The nature of the surface of organogermanium films, obtained by magnetically enhanced rf-plasma deposition from tetraethylgermane, was examined by ESCA (electron spectroscopy for chemical analysis) and FTIR methods56. 

In an earlier study of glow discharge polymerization of ethylene in a magnetically enhanced discharge by a 10 kHz power source, the distribution of polymer deposition on the surfaces of electrodes and on an aluminum plate inserted between two electrodes was investigated (10). 

Figure 5. Deposition rate profile on the electrode and substrate for a glow discharge polymerization of ethylene activated at a frequency of 10 kHz with magnetic enhancement. The system pressure is 20 fim Hg. (O) 60 mA, (A) 200...

Yasuda et al. [100,101] showed that the formation of carbides on the iron surface prior to plasma polymer deposition led to excellent corrosion protection properties in combination with a cathodic E-coat. In this work a special cathodic plasma pol5mierization with magnetic enhancement was used. With this experimental setup they were able to remove the oxide layer on steel almost eompletely in an plasma and to form Fe—C groups. The formation of Fe—C is the result of intensive ion bombardment of the surface. 

The Raman parameters reported for a-C(N) H films deposited by magnetic field enhanced RFPECVD in CH4-N2-He atmospheres also showed an intermediate N content range (about 7 at.%), with almost constant Raman parameters. In this case, the behavior was found to be associated with a nontypical variation of the C and N atom hybridization state, as discussed in Section 2.4.3. 

Most published work has focused on the deposition of Ni, Co, and NiCo alloys from hypophosphite electrolytes [14], and this part of the review will deal primarily with these alloys. Other Co alloys studied include CoZnP [15, 16], the recording characteristics of which were described by Soraya [17] CoSnP [18], which is reported to have enhanced corrosion resistance and the rhenium and manganese alloys used for vertical recording, discussed below. Other reductants, such as hydrazine [19], dimethylamine borane [20-22], pyridine borane [23], and borohydride [24, 25], can be used for the chemical deposition of nickel and cobalt, but to date there has been no significant application of these to the technology of magnetic media. 

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