Construction costs template

The levels of clean construction described herein can provide a practical means of meeting operational cleanliness goals in a cost-effective fashion. Each project, whether new construction or retrofit of an existing process, should have as part of it an evaluation of the required elements of the build clean protocol to be employed. The information provided below is broad and can act as a template for the protocol put in place for a specific project. 

Although the silicon micromachining process is well developed, extensive use of costly clean-room instrumentation is required. Thus, alternative and simpler template construction approaches are being pursued. One such method utilizes SU-8, an epoxy-based negative photoresist, which has excellent chemical resistance and mechanical properties. Patterned SU-8 is being applied increasingly in making microstructures for templates in microchip production... 

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