Chemically induced CD shrink techniques

The two main approaches employed in chemically induced CD shrink techniques are based on sidewall formation and sidewall erosion, respectively. 

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Chemically induced CD shrink techniques based on sidewall formation... 

Chemically induced CD shrink techniques based on sidewall erosion rely on chemical reactions that preferentially take place at the sidewalls of already-patterned resist features, leading to their erosion. The hydrophilic overlayer process is a good example of this technique. 

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